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Glove box 2 (Pattern generator)

equipment explanation
Model customized
Operating time MON(09:00~24:00)
TUE(09:00~24:00)
WED(09:00~24:00)
THU(09:00~24:00)
FRI(09:00~24:00)
Location 86291
inquiry Taesoo Kim
010-8549-6164
tskim0822@skku.edu
Reservation

System description

- Electrode contact parts patterning can be done by pattern generator system.

 

System specification

- O2 content : Less than 1 ppm

  H2O content : Less than 1 ppm 

  Atmospheric gas : Ar (5N)

 

  Pattern generator - Laser wavelength : 435 nm on normal PR (GXR 601, PR 4330), minimum pattern size ~ 1um 

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