논문명 |
Designs and processes toward high-aspect-ratio nanostructures at the deep nanoscale: unconventional nanolithography ans its applications |
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저자 |
Sori Lee, Byeonghak Park, Jun Sik Kim, Tae-il Kim |
저널 |
Nanotechnology 27(47), 474001-(2016) |
Abstract |
http://iopscience.iop.org/article/10.1088/0957-4484/27/47/474001/meta |
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